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TEM의 CBED (convergent beam electron diffraction)법을이용한 반도체 소자의 Strain 거동 분석
- Title
- TEM의 CBED (convergent beam electron diffraction)법을이용한 반도체 소자의 Strain 거동 분석
- Authors
- 박찬경
- Article Type
- Conference
- Citation
- 한국전자현미경학회 춘계학술대회
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Related Researcher
- 박찬경PARK, CHAN GYUNG
- Dept of Materials Science & Enginrg