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In-Situ Diagnosis using FT-IR and the Characterization of Hf Nitride Films
- Title
- In-Situ Diagnosis using FT-IR and the Characterization of Hf Nitride Films
- Authors
- 이시우
- Publisher
- American Vacuum Society
- Article Type
- Conference
- Citation
- AVS 53rd Internation Symposium
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