Conference
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
Etch characteristic of GaAs/AlGaAs heterostructure using bias-ECR etcher
- Title
- Etch characteristic of GaAs/AlGaAs heterostructure using bias-ECR etcher
- Authors
- 강봉구
- Date Issued
- 1989-01-01
- Publisher
- ICVC
- Article Type
- Conference
- Citation
- ICVC, page. 258, 1989-01-01
- Files in This Item:
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.
Communities & Collection
Related Researcher
- 강봉구KANG, BONG KOO
- Dept of Electrical Enginrg