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Deposition of Yttrium or Lanthanum-substituted Bismuth Titanate Films by DLI-MOCVD for Use in Non-Volatile Memories
- Title
- Deposition of Yttrium or Lanthanum-substituted Bismuth Titanate Films by DLI-MOCVD for Use in Non-Volatile Memories
- Authors
- 이시우
- Publisher
- The Electrochem. Soc
- Article Type
- Conference
- Citation
- Proc. of the 203rd Int. Conf. on CVD and EUROCVD, page. 1419
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