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Nano-composite Dual Phase Low-k SiCOH/CxHy Films by Plasma Chemical Vapor Deposition with VTMS(vinyltrimethylsilane)
- Title
- Nano-composite Dual Phase Low-k SiCOH/CxHy Films by Plasma Chemical Vapor Deposition with VTMS(vinyltrimethylsilane)
- Authors
- 이시우
- Publisher
- 반도체 학술대회
- Article Type
- Conference
- Citation
- 반도체 학술대회
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