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Atomic Vapor Deposited Tantalum Carbo-Nitride Film using TBTDET and Hydrogen
- Title
- Atomic Vapor Deposited Tantalum Carbo-Nitride Film using TBTDET and Hydrogen
- Authors
- 이시우
- Publisher
- Electrochemical Society
- Article Type
- Conference
- Citation
- ECS Transactions, page. 355
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