PZT 스퍼터 방법을 이용한 pMUT 제작

Abstract

The goal of this study is improving PZT sputtering and patterning techniques for applying it to Piezoelectric Micromachined Ultrasonic Transducers (pMUT) fabrication. In the previous study conducted by Xiong et al. it is shown that PZT thin film can be stably deposited on various surfaces by sputtering. In this study, a fabrication technique for microelectromechanical systems (MEMS) is developed by use of the PZT sputtering. To apply it to fabricate PZT thin film of pMUT, reproducible film making and developing patterning technique should be solved. For these problems, PZT seed layer and lift-off technique is applied. And applied the technique for making pMUT. The performance of fabricated pMUT is compared with pMUT fabricated with sol-gel technique.