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Scalable and high-throughput fabrication of periodic structures by single beam laser interference lithography
- Title
- Scalable and high-throughput fabrication of periodic structures by single beam laser interference lithography
- Authors
- LEE, TAEJUN; RHO, JUNSUK
- Date Issued
- 2018-08-14
- Publisher
- 포항공과대학교
- Article Type
- Conference
- Citation
- The 3rd A3 Metamaterials Forum, 2018-08-14
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Related Researcher
- 노준석RHO, JUNSUK
- Dept of Mechanical Enginrg