Nanowell-patterned TiO2 microcantilevers for calorimetric chemical sensing

Abstract

A sensitive calorimetric sensor using a TiO2 microcantilever with nanowells patterned on one of its sides is described. This single material cantilever is sensitive to temperature change without relying on the metal deposition-based bimetallic effect. The thermomechanical sensitivity originates from the structure dependent variations in both the elastic modulus and thermal expansion coefficient due to the presence of ordered nanowells. These cantilever beams offer an alternate and efficient chemical sensing route for vapor phase analytes using photothermal spectroscopy. Selective and sensitive detection of organophosphorus compounds, as well as their photocatalytic decomposition under ultraviolet light exposure are demonstrated. (C) 2014 AIP Publishing LLC.