DC Field | Value | Language |
---|---|---|
dc.contributor.author | Pham, TA | - |
dc.contributor.author | Kim, P | - |
dc.contributor.author | Kwak, M | - |
dc.contributor.author | Suh, KY | - |
dc.contributor.author | Kim, DP | - |
dc.date.accessioned | 2015-06-25T01:39:25Z | - |
dc.date.available | 2015-06-25T01:39:25Z | - |
dc.date.created | 2013-02-19 | - |
dc.date.issued | 2007-08 | - |
dc.identifier.issn | 1359-7345 | - |
dc.identifier.other | 2015-OAK-0000026492 | en_US |
dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/9929 | - |
dc.description.abstract | A novel negative, inorganic polymer photoresist was demonstrated to be suitable for simple and direct fabrication of tribological SiCN-based ceramic microstructures via UV photolithography and subsequent pyrolysis at 800 degrees C. | - |
dc.description.statementofresponsibility | open | en_US |
dc.language | English | - |
dc.publisher | ROYAL SOC CHEMISTRY | - |
dc.relation.isPartOf | CHEMICAL COMMUNICATIONS | - |
dc.rights | BY_NC_ND | en_US |
dc.rights.uri | http://creativecommons.org/licenses/by-nc-nd/2.0/kr | en_US |
dc.title | Inorganic polymer photoresist for direct ceramic patterning by photolithography | - |
dc.type | Article | - |
dc.contributor.college | 화학공학과 | en_US |
dc.identifier.doi | 10.1039/B708480C | - |
dc.author.google | Pham, TA | en_US |
dc.author.google | Kim, P | en_US |
dc.author.google | Kim, DP | en_US |
dc.author.google | Suh, KY | en_US |
dc.author.google | Kwak, M | en_US |
dc.relation.issue | 39 | en_US |
dc.relation.startpage | 4021 | en_US |
dc.relation.lastpage | 4023 | en_US |
dc.contributor.id | 10054896 | en_US |
dc.relation.journal | CHEMICAL COMMUNICATIONS | en_US |
dc.relation.index | SCI급, SCOPUS 등재논문 | en_US |
dc.relation.sci | SCI | en_US |
dc.collections.name | Journal Papers | en_US |
dc.type.rims | ART | - |
dc.identifier.bibliographicCitation | CHEMICAL COMMUNICATIONS, no.39, pp.4021 - 4023 | - |
dc.identifier.wosid | 000249925400020 | - |
dc.date.tcdate | 2019-01-01 | - |
dc.citation.endPage | 4023 | - |
dc.citation.number | 39 | - |
dc.citation.startPage | 4021 | - |
dc.citation.title | CHEMICAL COMMUNICATIONS | - |
dc.contributor.affiliatedAuthor | Kim, DP | - |
dc.identifier.scopusid | 2-s2.0-34948853244 | - |
dc.description.journalClass | 1 | - |
dc.description.journalClass | 1 | - |
dc.description.wostc | 10 | - |
dc.description.scptc | 15 | * |
dc.date.scptcdate | 2018-10-274 | * |
dc.type.docType | Article | - |
dc.subject.keywordPlus | SICN MEMS | - |
dc.subject.keywordPlus | FABRICATION | - |
dc.subject.keywordPlus | MICROSTRUCTURES | - |
dc.subject.keywordPlus | COMPOSITES | - |
dc.relation.journalWebOfScienceCategory | Chemistry, Multidisciplinary | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Chemistry | - |
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