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BAEK, ROCK HYUN(백록현)
scopus
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Dept of Electrical Engineering(전자전기공학과)
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Publication & Time Cited Count (For the Last 5 years)
Results 1-1 of 1 (Search time: 0.001 seconds).
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Date issued
2023
1
Type
Article
1
Subject
Al2O3
1
AL2O3 FILMS
1
DEPOSITION
1
H2 plasma treatment
1
high-k gate dielectric
1
interface trap
1
plasma-enhanced atomic layer depo...
1
SILICON
1
THIN
1
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SCIE
1
SCOPUS
1
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Date Issued
: [2020 TO 2023]
Type
: Article
Date Issued
: 2023
Subject
: high-k gate dielectric
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Article
H2 Plasma and PMA Effects on PEALD-Al2O3 Films with Different O2 Plasma Exposure Times for CIS Passivation Layers
SCIE
SCOPUS
Nanomaterials, vol. 13, no. 4, page. 731, 2023-02
안제현
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최경근
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박종서
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강보현
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HYUNSEO, YOU
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