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BAEK, ROCK HYUN(백록현)
scopus
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Dept of Electrical Engineering(전자전기공학과)
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Publication & Time Cited Count (For the Last 5 years)
Results 1-2 of 2 (Search time: 0.001 seconds).
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Date issued
2023
1
2022
1
Type
Article
2
Subject
Al2O3
2
SILICON
2
4H-SiC
1
AL2O3 FILMS
1
ATOMIC LAYER DEPOSITION
1
Bi-layer dielectric
1
DEPOSITION
1
DEVICES
1
DIELECTRICS
1
H2 plasma treatment
1
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SCIE
2
SCOPUS
2
Applied search limites :
Date Issued
: [2020 TO 2023]
Subject
: Al2O3
Journal Papers(International)
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Conference Papers(Domestic)
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Article
H2 Plasma and PMA Effects on PEALD-Al2O3 Films with Different O2 Plasma Exposure Times for CIS Passivation Layers
SCIE
SCOPUS
Nanomaterials, vol. 13, no. 4, page. 731, 2023-02
안제현
;
최경근
;
박종서
;
강보현
;
HYUNSEO, YOU
;
et al
Article
Effect of hydrogen plasma treatment on the electrical properties for SiC-based power MOSFETs
SCIE
SCOPUS
Microelectronic Engineering, vol. 258, 2022-04
Kim, Youn-Jang
;
Baek, Rock-Hyun
;
Chang, Sung Keun
;
Choi, Kyeong-Keun
1
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