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BAEK, ROCK HYUN(백록현)
scopus
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Dept of Electrical Engineering(전자전기공학과)
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Publication & Time Cited Count (For the Last 5 years)
Results 1-1 of 1 (Search time: 0.0 seconds).
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Date issued
2020
1
Type
Article
1
Subject
LOGIC TECHNOLOGY
1
MOBILITY MODEL
1
MOSFETS
1
Nanosheet FET
1
parasitic bottom transistor
1
PHOSPHORUS DIFFUSION
1
RECOMBINATION
1
SIMULATION
1
source/drain recess depth
1
sub 5-nm node
1
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Subject
: MOSFETS
Type
: Article
Subject
: MOSFETS
Date Issued
: 2020
Subject
: PHOSPHORUS DIFFUSION
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Article
Comprehensive Analysis of Source and Drain Recess Depth Variations on Silicon Nanosheet FETs for Sub 5-nm Node SoC Application
SCIE
SCOPUS
IEEE ACCESS, vol. 8, page. 35873 - 35881, 2020-02
BAEK, ROCK HYUN
;
JINSU, JEONG
;
YOON, JUN SIK
;
SEUNGHWAN, LEE
1
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