POLYMER ENGINEERING AND SCIENCE, vol. 50, no. 8, page. 1696 - 1704, 2010-08
MICROELECTRONIC ENGINEERING, vol. 87, no. 5-8, page. 1375 - 1378, 2010-05
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, vol. 20, no. 2, page. 25028, 2010-02
JAPANESE JOURNAL OF APPLIED PHYSICS, vol. 49, no. 6, 2010-01