Open Access System for Information Sharing
All
Title
Author
Subject
Login
Library
Help
검색
HOME
Communities & Collections
Researchers
Title
Browse by Researchers
YONG, KIJUNG(용기중)
scopus
Department
Dept. of Chemical Engineering(화학공학과)
Major(s)
-
E-Mail
×
E-Mail
Homepage
Co-researchers
네트워크
×
공저자 목록
뒤로가기
Keyword
Publication & Time Cited Count (For the Last 5 years)
Results 1-1 of 1 (Search time: 0.0 seconds).
Export
EXCEL
BIBTEX
Date issued
2019
1
Type
Article
1
Subject
ALD
1
Atomic layer deposition
1
Atoms
1
Crystallinity
1
Defects
1
High dielectric constants
1
High-k dielectric
1
Interface capacitance
1
Interfacial property
1
Low defect densities
1
next >
Journal Registered
SCIE
1
SCOPUS
1
Applied search limites :
Date Issued
: [2010 TO 2019]
Date Issued
: 2019
Subject
: Atoms
Journal Papers(International)
Journal Papers
(Domestic)
Conference Papers(International)
Conference Papers(Domestic)
20 건
100 건
200 건
Article
Improvement of the electrical and interfacial propertie of TiN/ZrO2 by a modulated atomic layer deposition process with controlled O-3 dosing
SCIE
SCOPUS
THIN SOLID FILMS, vol. 675, page. 153 - 159, 2019-04
Song, H.
;
Kim, D.
;
Kim, Y.
;
Jung, H.
;
Lim, H.
;
et al
1
Browse
Communities & Collections
Researcher
Title
Login
Library
Help