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YONG, KIJUNG(용기중) scopus

Department: Dept. of Chemical Engineering(화학공학과)

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Date Issued : [2002 TO 2009] Journal Registered : scie Subject : CHEMICAL-VAPOR-DEPOSITION

Article

Atomic layer deposition of hafnium silicate film for high mobility pentacene thin film transistor applicationsSCIESCOPUS

JOURNAL OF MATERIALS CHEMISTRY, vol. 19, no. 37, page. 6857 - 6864, 2009-07

Article

Growth and characterization of titanium silicate nanofilms for gate oxide applicationsSCIESCOPUS

JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, vol. 8, no. 2, page. 577 - 583, 2008-02

Article

Self-limiting growth of titanium silicate and effects of thermal annealing on the electrical properties of titanium silicate/SiO2SCIESCOPUS

SURFACE REVIEW AND LETTERS, vol. 14, no. 5, page. 921 - 925, 2007-10

Article

MOCVD and characterization of Hf-silicate thin films using HTB and TEMASSCIESCOPUS

JOURNAL OF NON-CRYSTALLINE SOLIDS, vol. 353, no. 11-12, page. 1172 - 1176, 2007-05-01

Article

Conformal growth and characterization of hafnium silicate thin film by MOCVD using HTB (hafnium tertra-tert-butoxide) and TDEAS (tetrakis-diethylamino silane)SCIESCOPUS

JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, vol. 18, no. 4, page. 391 - 395, 2007-04

Article

Growth and characterization of Hf-silicate/Al2O3 gate stacks grown on Si(100) by self-limiting atomic layer depositionSCIESCOPUS

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, vol. 45, no. 9A, page. 7080 - 7083, 2006-09

Article

Adsorption and reactions of tetrabutoxysilane (TBOS) on Si(100)SCIESCOPUS

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, vol. 23, no. 4, page. 613 - 616, 2005-07

Article

MOCVD of tungsten nitride films using W(CO)(6) and NH3 for Cu diffusion barrierSCIESCOPUS

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, vol. 151, no. 9, page. C594 - C597, 2004-08

Article

Highly conformal Cu thin-film growth by low-temperature pulsed MOCVDSCIESCOPUS

ELECTROCHEMICAL AND SOLID STATE LETTERS, vol. 6, no. 8, page. C106 - C108, 2003-08

Article

Thermal decomposition and desorption of diethylamido of tetrakis (diethylamido) zirconium (TDEAZr) on Si(100)SCIESCOPUS

SURFACE REVIEW AND LETTERS, vol. 10, no. 1, page. 121 - 125, 2003-02

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