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PARK, CHAN GYUNG(박찬경)
Department
Dept of Materials Science & Engineering(신소재공학과)
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Publication & Time Cited Count (For the Last 5 years)
Results 1-1 of 1 (Search time: 0.001 seconds).
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Date issued
2000
1
Type
Article
1
Subject
EPITAXIAL COSI2
1
FILM
1
MU-M
1
OXIDE
1
SILICIDES
1
SILICON
1
Journal Registered
SCIE
1
SCOPUS
1
Applied search limites :
Date Issued
: [2000 TO 2009]
Date Issued
: 2000
Type
: Article
Subject
: EPITAXIAL COSI2
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(Domestic)
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Article
Reaction of Co and capping layers and its effect on CoSi2 formation in Si/SiOx/Co system
SCIE
SCOPUS
APPLIED PHYSICS LETTERS, vol. 77, no. 10, page. 1443 - 1445, 2000-09-04
Kim, GB
;
Kwak, JS
;
Baik, HK
;
Lee, SM
;
Oh, SH
;
et al
1
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