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PARK, CHAN GYUNG(박찬경)
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Dept of Materials Science & Engineering(신소재공학과)
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Publication & Time Cited Count (For the Last 5 years)
Results 1-1 of 1 (Search time: 0.0 seconds).
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Date issued
2015
1
Type
Article
1
Subject
atom probe
1
CARBON
1
DIFFUSION
1
diffusion barrier
1
dopant distribution
1
floating gate
1
INTERFACE
1
SILICON
1
Journal Registered
KCI
1
SCIE
1
SCOPUS
1
Applied search limites :
Date Issued
: [2010 TO 2015]
Subject
: DIFFUSION
Subject
: diffusion barrier
Subject
: dopant distribution
Subject
: floating gate
Type
: Article
Subject
: atom probe
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(Domestic)
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Article
3-D Observation of Dopant Distribution at NAND Flash Memory Floating Gate Using Atom Probe Tomography
SCIE
SCOPUS
KCI
ELECTRONIC MATERIALS LETTERS, vol. 11, no. 1, page. 60 - 64, 2015-01
Lee, JH
;
Chae, BK
;
Kim, JJ
;
Lee, SY
;
Park, CG
1
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