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PARK, CHAN GYUNG(박찬경)
Department
Dept of Materials Science & Engineering(신소재공학과)
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Publication & Time Cited Count (For the Last 5 years)
Results 1-1 of 1 (Search time: 0.001 seconds).
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Date issued
2014
1
Type
Article
1
Subject
Atom probe
1
FIELD EVAPORATION BEHAVIOR
1
GATE
1
Interface reaction
1
PERFORMANCE
1
Preferential evaporation
1
SCALE
1
Shallow trench isolation
1
SILICON
1
SIO2
1
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SCIE
1
SCOPUS
1
Applied search limites :
Date Issued
: [2010 TO 2015]
Subject
: SIO2
Type
: Article
Subject
: SIO2
Subject
: FIELD EVAPORATION BEHAVIOR
Subject
: Atom probe
Subject
: SIO2
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Article
Study of vertical Si/SiO2 interface using laser-assisted atom probe tomography and transmission electron microscopy
SCIE
SCOPUS
MICRON, vol. 58, page. 32 - 37, 2014-03
Lee, JH
;
Lee, BH
;
Kim, YT
;
Kim, JJ
;
Lee, SY
;
et al
1
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