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PARK, CHAN GYUNG(박찬경)
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Dept of Materials Science & Engineering(신소재공학과)
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Publication & Time Cited Count (For the Last 5 years)
Results 1-1 of 1 (Search time: 0.002 seconds).
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Date issued
2004
1
Type
Article
1
Subject
EPITAXIAL-GROWTH
1
interfacial reaction
1
ion beam sputtering
1
neutralizer
1
preferred orientation
1
SI
1
SILICON
1
THIN-FILMS
1
transmission electron microscopy
1
W nano-particle
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SCIE
1
SCOPUS
1
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Journal Registered
: scie
Subject
: THIN-FILMS
Date Issued
: 2004
Subject
: EPITAXIAL-GROWTH
Subject
: ion beam sputtering
Subject
: SILICON
Subject
: interfacial reaction
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Article
Effects of neutralizers on the crystal orientation of YSZ films grown by using ion beam sputtering
SCIE
SCOPUS
VACUUM, vol. 74, no. 3-4, page. 423 - 430, 2004-06-07
Suh, JH
;
Oh, SH
;
Kim, HS
;
Choi, SY
;
Park, CG
1
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