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PARK, CHAN GYUNG(박찬경)
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Dept of Materials Science & Engineering(신소재공학과)
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2012
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Article
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AL
1
COPPER
1
crystal growth
1
crystal structure
1
diffusion
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METALS
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OXIDATION
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RELIABILITY
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SI
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Subject
: diffusion
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: METALS
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: METALS
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: crystal structure
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: SIZE
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: Article
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: thin films
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: crystal structure
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: Article
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Article
Impurity-controlled Mo films as diffusion barriers for Cu metallization
SCIE
SCOPUS
KCI
METALS AND MATERIALS INTERNATIONAL, vol. 18, no. 3, page. 517 - 520, 2012-06
Gu, GH
;
Park, SM
;
Park, CG
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