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PARK, CHAN GYUNG(박찬경)
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Dept of Materials Science & Engineering(신소재공학과)
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Publication & Time Cited Count (For the Last 5 years)
Results 1-1 of 1 (Search time: 0.001 seconds).
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Date issued
2013
1
Type
Article
1
Subject
atom probe
1
local magnification effect
1
shallow trench isolation
1
SILICON
1
SPECTROSCOPY
1
transition layer
1
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KCI
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SCIE
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SCOPUS
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: SILICON
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Subject
: local magnification effect
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: Article
Type
: Article
Date Issued
: 2013
Subject
: local magnification effect
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Article
3D Compositional Characterization of Si/SiO2 Vertical Interface Structure by Atom Probe Tomography
SCIE
SCOPUS
KCI
ELECTRONIC MATERIALS LETTERS, vol. 9, no. 6, page. 747 - 750, 2013-11
Lee, JH
;
Kim, YT
;
Kim, JJ
;
Lee, SY
;
Park, CG
1
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