Open Access System for Information Sharing
All
Title
Author
Subject
Login
Library
Help
검색
HOME
Communities & Collections
Researchers
Title
Browse by Researchers
PARK, CHAN GYUNG(박찬경)
Department
Dept of Materials Science & Engineering(신소재공학과)
Major(s)
-
E-Mail
×
E-Mail
Homepage
Co-researchers
네트워크
×
공저자 목록
뒤로가기
Keyword
Publication & Time Cited Count (For the Last 5 years)
Results 1-1 of 1 (Search time: 0.001 seconds).
Export
EXCEL
BIBTEX
Date issued
2009
1
Type
Article
1
Subject
atomic layer deposition
1
conduction bands
1
dielectric materials
1
FILMS
1
hafnium compounds
1
interface states
1
leakage currents
1
NEXAFS
1
oxidation
1
OXIDES
1
next >
Journal Registered
SCIE
1
SCOPUS
1
Applied search limites :
Subject
: SPECTROSCOPY
Subject
: dielectric materials
Subject
: FILMS
Journal Papers(International)
Journal Papers
(Domestic)
Conference Papers(International)
Conference Papers(Domestic)
20 건
100 건
200 건
Article
HFO2/HFOXNY/HFO2 GATE DIELECTRIC FABRICATED BY IN SITU OXIDATION OF PLASMA-ENHANCED ATOMIC LAYER DEPOSITION HFN MIDDLE LAYER
SCIE
SCOPUS
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, vol. 156, no. 8, page. G109 - G113, 2009-01
Maeng, WJ
;
Gu, GH
;
Park, CG
;
Lee, K
;
Lee, T
;
et al
1
Browse
Communities & Collections
Researcher
Title
Login
Library
Help