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PARK, CHAN GYUNG(박찬경)
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Dept of Materials Science & Engineering(신소재공학과)
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Publication & Time Cited Count (For the Last 5 years)
Results 1-1 of 1 (Search time: 0.001 seconds).
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Date issued
2008
1
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Article
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Subject
atomic layer deposition
1
CAPACITOR
1
CHEMICAL-VAPOR-DEPOSITION
1
ELECTRODE
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OXIDE THIN-FILMS
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oxygen exposure
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RU
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Ru
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RuCp2
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TA
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SCIE
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SCOPUS
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: atomic layer deposition
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Article
Effect oxygen exposure on the quality of atomic layer deposition of ruthenium from bis(cyclopentadienyl)ruthenium and oxygen
SCIE
SCOPUS
THIN SOLID FILMS, vol. 516, no. 21, page. 7345 - 7349, 2008-09-01
Park, SJ
;
Kim, WH
;
Maeng, WJ
;
Yang, YS
;
Park, CG
;
et al
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