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Showing results 1 to 4 of 4
Conference
Characterization of the initial ALD growth of TaN using Synchrotron X-ray Reflectivity.

2011KCS (제18회 한국반도체학술대회), 2011-02-16

Conference
In-situ Synchrotron Radiation X-ray Scattering Study on the Initial Structure of Atomic Layer Deposition.

ICPS2010, 2010-07-25

Conference
In-situ synchrotron X-ray scattering study on the initial structure of Ru-metal Atomic Layer Deposition films for the electronic devices.

2009MRS Spring Meeting, 2009-04-13

Conference
In-situ synchrotron X-ray scattering study on the initial structure of Ta(C)N Atomic Layer Deposition films for the electronic devices.

KJC-FE07, 2008-08-06

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