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Browsing by  AuthorKIM, KANGHYUN

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Showing results 1 to 10 of 10
Conference
EUV interference lithography study for materials evaluation

한국광학회 2021년도 동계학술발표회, 2021-02-17

Article
Fabrication of Oblique Submicron-Scale Structures Using Synchrotron Hard X-ray LithographySCIESCOPUS

Polymers, vol. 13, no. 17, page. 1045 - 1045, 2021-03

Conference
Fabrication of Trapezoidal Re-entrant Structure with UV and X-ray Lithography

한국정밀공학회 2021년도 춘계학술대회, 2021-05-12

Article
Highly flexible and transparent film heater with electrospun copper conductive network via junction-free structureSCIESCOPUS

Journal of Alloys and Compounds, vol. 886, 2021-12

Article
Investigation of correlative parameters to evaluate EUV lithographic performance of PMMASCIESCOPUS

RSC Advances, vol. 12, no. 5, page. 2589 - 2594, 2022-01

Conference
Investigation on interaction between EUV photon and hydrogen silsesquioxance

2021 차세대 리소그래피 학술대회, 2021-11-17

Conference
Prediction study of the theoretical contrast of extreme ultraviolet photoresist by electron beam and EUV exposure test

2019 차세대 리소그래피 학술대회, 2019-08-21

Conference
Simulation of self-capacitance for capacitor type distance sensor

ISIITA 2021, 2021-08-24

Conference
The enhancement of the CNT nanowire by acylation reaction

IAIITA 2018, 2018-01-31

Article
엑스선 그레이 스케일 리소그래피를 활용한 반원형 단면의 서브 마이크로 선 패턴의 바이오멤스 플랫폼 응용KCI

Journal of Sensor Science and Technology, vol. 30, no. 3, page. 170 - 174, 2021-05

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