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전체 가 나 다 라 마 바 사 아 자 차 카 타 파 하

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Article

Effect of plasma process-induced damage on bias temperature instability of MOSFETsSCIESCOPUS

MICROELECTRONIC ENGINEERING, vol. 83, no. 3, page. 415 - 422, 2006-03

Article

Plasma process induced damages on n-MOSFET with plasma oxidized and nitrided gate dielectricsSCIESCOPUS

MICROELECTRONIC ENGINEERING, vol. 75, no. 4, page. 443 - 452, 2004-11

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