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Demonstration of TiO2 based ultra high-k (k=30) MIS capacitor and its electrical properties
- Title
- Demonstration of TiO2 based ultra high-k (k=30) MIS capacitor and its electrical properties
- Date Issued
- 2020-02-14
- Publisher
- 제 27회 반도체학술대회
- Article Type
- Conference
- Citation
- 제 27회 반도체학술대회, 2020-02-14
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Related Researcher
- 백록현BAEK, ROCK HYUN
- Dept of Electrical Enginrg