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CMOS compatible MIM decoupling capacitor with reliable sub-nm EOT high-k stacks for the 7 nm node and beyond
- Title
- CMOS compatible MIM decoupling capacitor with reliable sub-nm EOT high-k stacks for the 7 nm node and beyond
- Authors
- KIM, SEYOUNG
- Date Issued
- 2016-12-05
- Publisher
- Institute of Electrical and Electronics Engineers
- Article Type
- Conference
- Citation
- 2016 IEEE International Electron Devices Meeting, 2016-12-05
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