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Systematic analysis of electron traps of HfSiON/SiO2 nMOSFETs using TSCIS
- Title
- Systematic analysis of electron traps of HfSiON/SiO2 nMOSFETs using TSCIS
- Authors
- KANG, BONG KOO; Giyoun Roh; Hyeokjin Kim
- Date Issued
- 2019-09-02
- Publisher
- SSDM
- Article Type
- Conference
- Citation
- 2019 International Conference on Solid State Devices and Materials, 2019-09-02
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Related Researcher
- 강봉구KANG, BONG KOO
- Dept of Electrical Enginrg