A Simple Fabrication Process based on Micro-Masonry for the Realization of Nanoplate Resonators with Integrated Actuation and Detection Schemes
SCOPUS
- Title
- A Simple Fabrication Process based on Micro-Masonry for the Realization of Nanoplate Resonators with Integrated Actuation and Detection Schemes
- Authors
- KIM, SEOK
- Date Issued
- 2016-03
- Publisher
- Frontiers Media S.A.
- Abstract
- In this work, we use the micro-masonry technique to fabricate nanoplate resonators with integrated electrostatic actuation and capacitive detection in a few steps. Our approach is an alternative solution to the current fabrication methods used to create membranes and plates that usually rely on the selective etching of a sacrificial layer. Highly doped silicon plates were transfer printed using microtip elastomeric stamps onto insulated bases displaying cavities in order to form suspended structures with airtight gaps. By post-processing adequate interconnections, the fabricated resonators were actuated and their resonant frequency measured in a fully integrated manner. The tested nanoplate devices behave as predicted by theory and offer quality factors of more than 30 in air.
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/105755
- DOI
- 10.3389/fmech.2016.00001
- ISSN
- 2297-3079
- Article Type
- Article
- Citation
- Frontiers in Mechanical Engineering, vol. 2, 2016-03
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- There are no files associated with this item.
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