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반도체 제조 공정 내 웨이퍼 결함 패턴 관련 핵심 설비 탐색
- Title
- 반도체 제조 공정 내 웨이퍼 결함 패턴 관련 핵심 설비 탐색
- Authors
- KIM, KWANG JAE; CHOI, SEUNGHYUN; BAE, YOUNG MOK; KIM,EN SOO; HWANG, CHAN HO; OH, YOUNG CHAN; LEE, DONG HYEE
- Date Issued
- 2020-07-06
- Publisher
- 2021 Spring Conference of Korean Society of Quality Management
- Article Type
- Conference
- Citation
- 2021 Spring Conference of Korean Society of Quality Management, 2020-07-06
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Related Researcher
- 김광재KIM, KWANG JAE
- Dept. of Industrial & Management Eng.