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Drastic reliability improvement using H2O2/UV treatment of HfO2 for heterogeneous integration
- Title
- Drastic reliability improvement using H2O2/UV treatment of HfO2 for heterogeneous integration
- Authors
- LEE, BYOUNG HUN
- Date Issued
- 2021-03-23
- Publisher
- IEEE
- Article Type
- Conference
- Citation
- IRPS 2021, 2021-03-23
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