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Channel Trimming Process to Improve Electro-thermal Characteristics for Sub-3-nm Node Nanosheet Field-Effect Transistors with Laser Spike Annealing
- Title
- Channel Trimming Process to Improve Electro-thermal Characteristics for Sub-3-nm Node Nanosheet Field-Effect Transistors with Laser Spike Annealing
- Authors
- BAEK, ROCK HYUN; 이상욱; 정진수; 이승환; S. Lee; 임재완; S. C. Song; S. Ekbote; N. Stevens-Yu; D. Greenlaw
- Date Issued
- 2023-09-08
- Publisher
- 2023 SSDM
- Article Type
- Conference
- Citation
- 2023 International Conference on Solid State Devices and Materials (SSDM), 2023-09-08
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Related Researcher
- 백록현BAEK, ROCK HYUN
- Dept of Electrical Enginrg