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Novel scheme to form non-uniform oxide in gate-all-around NCFETs for capacitance matching
- Title
- Novel scheme to form non-uniform oxide in gate-all-around NCFETs for capacitance matching
- Date Issued
- 2023-02-15
- Publisher
- KCS
- Article Type
- Conference
- Citation
- 제 30회 한국반도체학술대회, 2023-02-15
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Related Researcher
- 백록현BAEK, ROCK HYUN
- Dept of Electrical Enginrg