Full metadata record
DC Field | Value | Language |
dc.contributor.author | BAEK, ROCK HYUN | - |
dc.contributor.author | 이상욱 | - |
dc.contributor.author | 윤준식 | - |
dc.contributor.author | 정진수 | - |
dc.contributor.author | 이승환 | - |
dc.contributor.author | 이준종 | - |
dc.contributor.author | 임재완 | - |
dc.date.accessioned | 2024-01-23T00:33:57Z | - |
dc.date.available | 2024-01-23T00:33:57Z | - |
dc.date.created | 2023-12-19 | - |
dc.date.issued | 2022-01-25 | - |
dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/119864 | - |
dc.language | Korean | - |
dc.publisher | KCS | - |
dc.relation.isPartOf | 제 29회 한국반도체학술대회 | - |
dc.title | Sensitivity Analysis of Each Inner Spacer Thickness Variation in Sub 3-nm Node Si Nanosheet FETs | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.identifier.bibliographicCitation | 제 29회 한국반도체학술대회 | - |
dc.citation.conferenceDate | 2022-01-24 | - |
dc.citation.conferencePlace | KO | - |
dc.citation.title | 제 29회 한국반도체학술대회 | - |
dc.contributor.affiliatedAuthor | BAEK, ROCK HYUN | - |
dc.contributor.affiliatedAuthor | 이상욱 | - |
dc.contributor.affiliatedAuthor | 윤준식 | - |
dc.contributor.affiliatedAuthor | 정진수 | - |
dc.contributor.affiliatedAuthor | 이승환 | - |
dc.contributor.affiliatedAuthor | 이준종 | - |
dc.contributor.affiliatedAuthor | 임재완 | - |
dc.description.journalClass | 2 | - |
dc.description.journalClass | 2 | - |
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