용액에서 결정화된 전구체를 이용한 폴리에틸렌 옥사이드 나노 패턴의 박막 제조

Abstract

Poly(ethylene oxide) (PEO) films with uniform nanopatterns were prepared by spin-coating aged dilute solutions containing crystallized precursors. To prepare the crystallized precursors of PEO in toluene, a PEO solution was heated at 70°C for 20 min and incubated at 18°C for 6 hours. The crystallized precursors in the solution were metastable and had a fibrillar morphology that deformed during the spin-coating process. The spin-coating conditions required to obtain a uniformly striped nanopattern were: a spin speed between 2000 and 4000 rpm and a PEO mass fraction in the range 0.2–0.4 wt%. Blocky PEO stripes formed from flat-on lamellar crystals (the chain axis was perpendicular to the substrate) were 10 nm thick, 100 nm wide, and 50 µm long and were arranged in periodic stacks with a period of 200 nm in one direction over a 50 × 50 µm2 area on a silicon wafer. Dense arrangement of the PEO stripes on the silicon wafer during spin-coating produced a grain boundary line in the shape of a distorted hexagonal closed curve (DHCC) on the centimeter length scale. In the DHCC, uniform nanopatterns composed of blocky fibers formed a radial pattern that spread out from a point in the middle of the DHCC to the grain boundary line.