Spectroscopic ellipsometric study of ZnO and Zn1-xMgxO thin films grown on (0001) sapphire substrate
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- Title
- Spectroscopic ellipsometric study of ZnO and Zn1-xMgxO thin films grown on (0001) sapphire substrate
- Authors
- Kang, TD; Lee, H; Park, WI; Yi, GC
- Date Issued
- 2004-01
- Publisher
- KOREAN PHYSICAL SOC
- Abstract
- We grew ZnO and Zn1-xMgxO thin films on (0001) sapphire substrates by using metal-organic vapor phase epitaxy and measured the pseudo-dielectric functions using variable-angle spectroscopic ellipsometry. We analyzed the pseudo-dielectric functions by using the multi-layer model. The dielectric functions were fitted by using a Holden model dielectric function. We used anisotropic layer modeling for the ZnO thin film, whereas we adopted the approximation of isotropic layer modeling for the Zn1-xMgxO alloys. We also discuss the Mg composition dependence of the bandgap and the binding energy in Zn1-xMgxO alloys, and consider the valence-band ordering in ZnO thin films.
- Keywords
- ZnO; dielectric function; ellipsometry; critical point; Holden model; PHOTOREFLECTANCE SPECTRA; OPTICAL-CONSTANTS; ZINC-OXIDE; CRYSTALS; LAYER
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/18136
- ISSN
- 0374-4884
- Article Type
- Article
- Citation
- JOURNAL OF THE KOREAN PHYSICAL SOCIETY, vol. 44, no. 1, page. 129 - 132, 2004-01
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