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Conference
Direct liquid injection-metal organic chemical vapor deposition 공정을 이용한 BLT 강유전체 박막의 증착
화학공학의 이론과 응용, page. 4810 - 4813, 2002-10-24
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Conference
VTMS 전구체를 이용한 직접 플라즈마 CVD 저유전체 박막의 제조 및 평가
화학공학의 이론과 응용, page. 4834 - 4837, 2002-10-24
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