ALD OF NANOMETAL FILMS AND APPLICATIONS FOR NANOSCALE DEVICES
- Title
- ALD OF NANOMETAL FILMS AND APPLICATIONS FOR NANOSCALE DEVICES
- Authors
- 김형준
- Date Issued
- 2006-01
- Publisher
- 한국결정학회
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/30113
- ISSN
- 1229-8700
- Article Type
- Article
- Citation
- 한국결정학회지, vol. 16, no. 2, page. 89 - 101, 2006-01
- Files in This Item:
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.