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TOTAL REFLECTION X-RAY FLUORESCENCE SPECTROSCOPY USING SYNCHROTRON RADIATION FOR TRACE IMPURITY ANALYSIS OF SILICON WAFER SURFACES
- Title
- TOTAL REFLECTION X-RAY FLUORESCENCE SPECTROSCOPY USING SYNCHROTRON RADIATION FOR TRACE IMPURITY ANALYSIS OF SILICON WAFER SURFACES
- Authors
- C. H. Chang; Y. M. Koo; H. Padmore
- POSTECH Authors
- Y. M. Koo
- Date Issued
- 1996-01
- Publisher
- 대한금속재료학회
- Article Type
- Article
- Citation
- METALS AND MATERIALS INTERNATIONAL, vol. 2, no. 1, page. 23 - 29, 1996-01
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Related Researcher
- 구양모KOO, YANG MO
- Ferrous & Energy Materials Technology