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Design parameter analysis for a planar type reactive ion etcher
- Title
- Design parameter analysis for a planar type reactive ion etcher
- Date Issued
- 1989-01
- Publisher
- J. of KITE
- Article Type
- Article
- Citation
- J. of KITE, vol. 26, page. 1658 - 1666, 1989-01
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Related Researcher
- 강봉구KANG, BONG KOO
- Dept of Electrical Enginrg