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CONTROL FOR ADVANCED SEMI-CONDUCTOR DEVICE MANUFACTURING
- Title
- CONTROL FOR ADVANCED SEMI-CONDUCTOR DEVICE MANUFACTURING
- Authors
- T. Kailath; C. Schaper; Y. Cho; P. Gyugyi; S. Norman; P. Park; S. Boyd; G. Franklin; K. Saraswat; M.
- Date Issued
- 1996-01
- Publisher
- CRC PRESS
- Article Type
- Article
- Citation
- THE CONTROL HANDBOOK, page. 1243 - 1259, 1996-01
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Related Researcher
- 박부견PARK, POOGYEON
- Dept of Electrical Enginrg