실리콘에 도핑된 붕소의 정량분석에 대한 공동분석연구
- Title
- 실리콘에 도핑된 붕소의 정량분석에 대한 공동분석연구
- Authors
- KIM, JAE NAM; KIM, KYUNG JOONG; KIM, HYUN KYUNG; MOON, DAE WON; HONG, TAE EN; JEONG, CHIL SUNG; KIM, YI KYUNG; LIM CEOL HO; KIM, JEONG HO
- Date Issued
- 2002-12
- Publisher
- 한국진공학회
- Abstract
- A domestic round robin test(RRT) for the quantitative analysis of minor impurities was performed by a standard procedure and standard reference material. The certified reference material(CRM)s for B-doped Si thin film and analysis specimens and the analysis specimens were prepared by an ion beam sputter deposition method. These samples were certified by inductively coupled plasma mass spectrometry(ICP-MS) with isotope dilution method which is one of the most quantitative methods in chemical analysis. By using an international standard procedure(ISO/DIS-14237) for the quantitative analysis of B in Si by SIMS, a domestic RRT was performed for these specimens. Although only a few laboratories participated in this RRT, the average B concentration well agreed with the certified value within 2% error.
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/40851
- ISSN
- 2288-6559
- Article Type
- Article
- Citation
- 한국진공학회지, vol. 11, no. 4, page. 218 - 224, 2002-12
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- There are no files associated with this item.
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