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New multi frequency capacitance extraction methodology for leaky MOS capacitor with High-K dielectric and metal gate
- Title
- New multi frequency capacitance extraction methodology for leaky MOS capacitor with High-K dielectric and metal gate
- Authors
- 백록현; 최길복; 홍승호; 최현식; 이경택; 박민상; 송승현; 김재철; 사공현철; 강창용; 이병훈; G. Bersuker; H. H. Tseng; R. Jammy; 정성우; 정윤하
- Date Issued
- 2008-09-29
- Publisher
- IEEE Device Society
- Article Type
- Conference
- Citation
- ISAGST 2008, 2008-09-29
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Related Researcher
- 백록현BAEK, ROCK HYUN
- Dept of Electrical Enginrg