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Characteristics of Silicon Capacitive Accelerometer Developed by Micromachining Technique
- Title
- Characteristics of Silicon Capacitive Accelerometer Developed by Micromachining Technique
- Authors
- 임근배; M. Nishizawa; H. Niitsuma; M. Esashi
- Date Issued
- 1998-06-15
- Publisher
- Society of Exploration Geophysicists of Japan
- Article Type
- Conference
- Citation
- Proceeding of the 98th SEGJ (Society of Exploration Geophysicists of Japan) Conference, 1998-06-15
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Related Researcher
- 임근배LIM, GEUN BAE
- Dept of Mechanical Enginrg