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Silicidation for Forming Low Contact Resistance of Ohmic Contact on 4H-SiC using Ni and Ti/Ni Layer
- Title
- Silicidation for Forming Low Contact Resistance of Ohmic Contact on 4H-SiC using Ni and Ti/Ni Layer
- Authors
- 이정수
- Date Issued
- 2013-07-12
- Publisher
- 5th International Symposium on IT convergence Engineering
- Article Type
- Conference
- Citation
- 5th International Symposium on IT convergence Engineering, 2013-07-12
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Related Researcher
- 이정수LEE, JEONG SOO
- Dept of Electrical Enginrg