Conference
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
Atom probe study on the adhesion property and compositional variation in W/poly–Si NAND gate structure with inter-control layer
- Title
- Atom probe study on the adhesion property and compositional variation in W/poly–Si NAND gate structure with inter-control layer
- Date Issued
- 2013-08-04
- Publisher
- TMS
- Article Type
- Conference
- Citation
- PRICM 8, 2013-08-04
- Files in This Item:
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.
Communities & Collection
Related Researcher
- 박찬경PARK, CHAN GYUNG
- Dept of Materials Science & Enginrg