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Optimization of surface temperature distribution for point defects control in the silicon single crystal by using the variational principle
- Title
- Optimization of surface temperature distribution for point defects control in the silicon single crystal by using the variational principle
- Authors
- 강인석
- Date Issued
- 2001-04-01
- Publisher
- Theories and Applications of Chem. Eng.
- Article Type
- Conference
- Citation
- Theories and Applications of Chemical Engineering, page. 481 - 484, 2001-04-01
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Related Researcher
- 강인석KANG, IN SEOK
- Dept. of Chemical Enginrg