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Metal-alkylamide와 metal-alkoxide 화합물을 사용한 Hf-silicate 박막의 원자층화학증착 및 유기금속화학증착
- Title
- Metal-alkylamide와 metal-alkoxide 화합물을 사용한 Hf-silicate 박막의 원자층화학증착 및 유기금속화학증착
- Authors
- 김재현
- Date Issued
- 2006
- Publisher
- 포항공과대학교
- URI
- http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001907577
https://oasis.postech.ac.kr/handle/2014.oak/7795
- Article Type
- Thesis
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